mechanical metrology
Film Stress Measurement System
By Toho - Flexus (2025)
University of Massachusetts Lowell
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Note: all equipment is reserved in increments of 30min. The Clean Room Entrance Fee is required in addition to the hourly rate. Please book both the tool and the 'Clean Room Entrance'. System for measuring film stress through substrate curvature analysis.
Min. Booking: 1 hours
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