
Thermo Scios2 Dual-Beam SEM/FIB
By Thermo
The Thermo Scientific Scios 2 DualBeam is an ultra-high-resolution analytical focused ion beam scanning electron microscopy (FIB-SEM) system that provides outstanding sample preparation for a wide range of samples, including magnetic and non-conductive materials Excellent performance on a wide range of samples, including magnetic and non-conductive materials with SEM resolution: 1 nm at 30 kV and 1.6 nm@1 kV A variety of integrated in-column and below-the-lens detectors. With its in-lens Trinity™ detection technology, the system is designed for simultaneous acquisition of angular and energy-selective SE and BSE imaging. Beam deceleration mode imaging with landing energies to as low as 20 eV High-performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE) Artifact-free imaging and patterning with dedicated modes such as SmartScan™ (256 frame average or integration, line integration and averaging, interlaced scanning), Drift Compensated Frame Integration (DCFI), and Drift Suppression. FIB charge neutralizer (low energy electron flood source) and Drift Suppression for milling non-conductors XY range: 110 mm, Z range: 65 mm, Rotation: 360° (endless), Tilt range: -15° to +90°, XY repeatability: 3 μm, Max sample height: Clearance 85 mm to eucentric point, Max sample weight at 0° tilt: 2 kg (including sample holder), Max sample size: 110 mm with full rotation User guidance available, making it easy for novice users to be productive quickly. In addition, features such as “undo” and “redo” encourage greater experimentation with peace of mind. This instrument also includes capabilities for in-situ electron backscatter diffraction (EBSD) analysis and energy dispersive spectroscopy (EDS) analysis combined with FIB processing and imaging. Neighbor Pattern Averaging & Reindexing (NPAR™) allows operation at higher noise levels than conventional indexing, therefore a faster collection rate at lower beam currents. EDAX OIM Analysis™ s