Field-emission Scanning Electron Microscope

Sample Characterization Equipment. Location: Olney OG-1. Training Estimates: 6 Hours and must have demonstrated proficiency in using JEOL 6390 SEM. Cold-cathode tip field emission gun; 1.0 nm resolution at 15 kV accelerating voltage; 0.1 – 30 kV accelerating voltage range; 25x – 1,000,000x magnification range. Multiple detectors including Everhart-Thornley secondary electron detector, semi-in-lens secondary electron detector with r-filter, and pneumatically retractable solid state back-scattered electron detector. Large specimen exchange port accommodating 4 inch diameter and 40 mm height samples. EDAX Genesis XM2 Imaging System with 10 mm2 Si(Li) detector for EDS analysis. Nanometer Patterning Generation System for e-beam lithography.