ThetaProbe-Parallel Angle Xray Photoelectron Spectrometer

Surface sensitive, quantitative, elemental and chemical state characterization, non-destructive depth profiling. Key Functionalities • High resolution, quantitative surface spectroscopy providing elemental and chemical state information • Spatially-resolved, surface-specific elemental and chemical state mapping • Non-destructive depth profiling via parallel angle data acquisition • High resolution sputter depth profiling • Advanced sample handling capabilities for transfer/characterization of samples Key Configuration Parameters • 2D multi-channel detector capable of both parallel energy and angular acquisition (60o range) • Monochromated Al K-alpha xray source, micro-focused variable spot-size of 15-400um • Argon ion source for profiling/cleaning of specimen (Zalar rotation possible) • Charge compensation • Integrated sample preparation and modification chamber equipped with specimen parking, sample heating, gas-dosing, additional ports for bolt-on systems • Sample heating/cooling (during characterization) • Advanced specimen transfer system (in-vacuo, controlled-atmosphere, and cryo transfer)