FEI Quanta 3D FEG FIB

The FEI Quanta 3D FEG is a state-of-the-art dual-beam (SEM/FIB) instrument. It is capable of high resolution surface imaging (1nm resolution at 30kV), fast composition analysis, crystal structure determination, orientation mapping, micromachining, Pt deposition, and TEM specimen preparation. It may be operated under three different vacuum modes: high vacuum, low vacuum and environmental (ESEM). Either dry inorganic samples or hydrated biological samples can be observed in this instrument.