
electron beam_lithography
Direct Write E-Beam Lithography System
By Raith - 150Two (2025)
University of Massachusetts Lowell
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Raith Electron Beam Lithography/Imaging 150Two. Training Requirements: 4 to 6 hours. Daily Entry Fee is required. Please create a 'Daily Entry Fee' reservation in addition to Raith tool reservation. The Raith 150two is an electron beam write system that can image to less than 10 nanometers. Main Applications: Nano-lithography, Imaging. Up to 30kV. SE and BSE detectors.
Min. Booking: 1 hours
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