Scanning Electron Microscope

Sample Characterization Equipment. Location: Olney OG-2. Training Estimate: 4 hours. Conventional tungsten thermionic emission gun; 3.0 nm resolution at 30 kV accelerating voltage; 0.5 – 30 kV accelerating voltage range; 5x – 300,000x magnification range. One chamber-mounted Everhart-Thornley type secondary electron detector for both SE and BE imaging. Large specimen chamber accommodating up to 6 inch diameter wafers, eucentric goniometer stage with manual X-, Y-, Z-, R- and Tilt- axes. Automated features: Auto Focus/Auto Stigmation; Auto Contrast and Brightness; Auto gun saturation, bias and alignment. Include Sample Description and Analysis Requirements in note section of Order Form.