Verios 460 Extreme High Resolution Scanning Electron Microscope (XHR SEM)

The Verios 460 is capable of sub-nanometer characterization of materials. Super high contrast and image quality can be preserved by integrated beam decelerator, which maintains primary beam coherency, but a low landing energy. Elstar Schottky monochromated (UC) field emission gun (FEG) column provides sub-nanometer resolution (0.6 - 0.7nm) performance from 1 to 30 kV integrated beam deceleration allowing beam landing energies as low as 20 eV piezo-enabled 100x100 mm 5-axis motorized eucentric stage advanced detectors including Everhart-Thornley SED, in-column & below-the-lens detectors, SmartScan and Oxford energy dispersive X-ray spectrometer (EDS) system for elemental mapping and analysis