FEI Quanta 3D FEG FIB (Field Emission Gun Focused Ion Beam) system

The FEI Quanta 3D FEG FIB is a powerful tool for SEM (Scanning Electron Microscope) imaging to aid removal and deposition of materials at a micro/nano scale with a resolution of 1.2 nm in the HiVac mode, 2.9 nm in LoVac mode, and 7 nm with the FIB column. The system includes gas injector modules (GIS) and an Omniprobe micromanipulator can be used for TEM sample preparation and lift-out. A Peltier/Heating Stage Control Kit allows for the study of in situ dynamic behavior of materials at different humidity (up to 100% RH) and temperatures (-10°C to 1000°C).