Field-emission Scanning Electron Microscope

JSM 7401F Unit 2 - Saab ETIC building (Room 154 A). Training Requirements: 6 hours and must have demonstrated proficiency in using the JEOL 6390 SEM. Cold-cathode tip field emission gun; 1.0 nm resolution at 15 kV accelerating voltage; 0.1 – 30 kV accelerating voltage range; 25x – 1,000,000x magnification range. Multiple advanced detectors including semi-in-lens secondary electron detector with r-filter, semi-in-lens solid state backscattered electron detector, and pneumatically retractable solid state back-scattered electron detector. Large specimen exchange port accommodating 4 inch diameter and 40 mm height samples, eucentric goniometer stage with fully PC-automated X-, Y-, Z-, tilt and R- axes. Energy Dispersive Spectroscopy (EDS), using Oxford Ultim Max Detector with 170 mm2 SSD detector for detection of all elements down to Li, and AZtec software for image acquisition, x-ray signal mapping and qualitative and quantitative analysis.