ThermoFisher Helios 5 Hydra UX PFIB

Electron beam resolution At optimum WD • 0.7nm at 1 kV At coincident Point • 0.6 nm at 15 kV • 1.2 nm at 1 kV Electron beam parameter space • Electron beam current range: 0.8 pA to 100 nA at all accelerating voltages • Accelerating voltage range: 350 V – 30 kV • Landing energy: 20* eV – 30 keV • Maximum horizontal field width: 2.3 mm at 4 mm WD Ion Optics High-performance PFIB column with unique Inductively Coupled Plasma (ICP) source supporting four ion species with fast switching capability • Ion species (primary ion beam): Xe, Ar, O, N • Switching time <10 minutes, only software operation • Ion beam current range: 1.5 pA to 2.5 µA • Accelerating voltage range: 500 V – 30 kV • Maximum horizontal field width: 0.9 mm at beam coincidence point Xe ion beam resolution at coincident point • <20 nm at 30 kV using preferred statistical method • <10 nm at 30 kV using selective edge method Detectors • Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE) • Everhart-Thornley SE detector (ETD) • IR camera for viewing sample/column • High-performance In-Chamber Electron and Ion Detector (ICE), for secondary ions (SI) and electrons (SE) • In-Chamber Thermo Scientific Nav-Cam™️ Sample Navigation Camera • Retractable low-voltage, high-contrast directional solid-state backscatter electron detector (DBS) • Integrated beam current measurement Analytical Detectors • EDAX Octane Elite Super EDS • EDAX Velocity Ultra EBSD Stage and Sample High-precision, five-axis motorized stage with Piezo-driven XYR axis • XY range: 150 mm • Z range: 10 mm • Rotation: 360° (endless) • Tilt range: -38° to +60° • XY repeatability: 1 μm • Max sample height: Clearance 55 mm to eucentric point • Max sample weight at 0° tilt: 500 g (including sample holder) • Max sample size: 150 mm with full rotation • Compucentric rotation and tilt Chamber • E- and I- beam coincidence point at analytical WD (4 mm SEM) • Ports: 21 • Inside width: 379 mm • Integrated plasma cleaner