Ultra Plus

Imaging & Analysis Facility Use The Ultra Plus Field Emission Scanning Electron Microscope (FESEM) enables high resolution surface examination. A side-mounted air-lock enables faster sample loading than on our other FESEMs. This SEM has a cross-over free Zeiss Gemini column, and uses a low to moderate energy (0.1 to 30 keV) electron beam to image a sample in high vacuum with resolution of 1 nm at 15 keV and 1.7 nm at 1 keV. Detectors available: In-lens SE, Everhart-Thornley, EsB (Energy selective Backscattered electron) detector and STEM (Scanning Transmission Electron detector). The Ultra Plus also has a Charge Compensation (CC) system which places a gas needle close to the sample for localized gas (N2) injection to reduce charging. Laboratory for Integrated Science and Engineering © 2025 Harvard CNS. All rights reserved. Center for Nanoscale Systems *