plasma processing
Oxford RIE A - BCL3, Cl2, SF6, AR
By Oxford - Plasmalab 80+ (2025)
University of Massachusetts Lowell
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Oxford Plasmalab 80+ Reactive Ion Etcher. Daily user entrance fee required. Please book in increments of 30min. Available gases: Cl2, Bcl3, SF6, Ar. Training is required before use.
Min. Booking: 1 hours
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