JSM-7400F

The JSM-7400F field emission scanning electron microscope has a 1 nm resolution at 15 kV and a 1.5 nm resolution at 1 kV. It allows operation in a wide range of beam energies from 0.1 keV to 30 keV, and affords various operation modes, including secondary electron imaging (SEI), backscattered electron imaging, gentle beam mode, and imaging with energy filters. An ultrathin window energy-dispersive X-ray spectroscopy (XEDS) detector identifies elements of an atomic number greater than four, and offers a 130 eV spectral resolution. This SEM also allows remote control via the internet.