Kalpha XPS - High-Throughput Xray Photoelectron Spectrometer

Key Functionalities •High sensitivity, high spectral resolution quantitative surface spectroscopy providing elemental and chemical state information •Spatially-resolved, surface-specific elemental and chemical state mapping •High resolution depth profiling •Large capacity, flexible specimen mounting •Highly-integrated and intuitive control system Key Configuration Parameters •Monochromated Al K-alpha X-ray, micro-focused variable spot-size of 30-400um •Charge compensation •Argon ion source for profiling/cleaning of specimen (with computational Zalar rotation possible) •Pre-tilt sample wedges (20o and 30o) for angle-resolved characterization •60 mm x 60 mm sample platten with highly-flexible specimen mounting options •Fully digital control, automated operation, integrated data acquisition and analysis software